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The SMIF-LPT (Load Port Transfer) is an ergonomically designed SMIF-I/O that easily integrates SMIF-Pod cassette loading and unloading into a wide variety of 200mm and 150mm wafer processing and metrology tools. The SMIF-LPT is designed for adaptive and equipment manufacturer applications for vacuum load-lock tools, which require an external ...
SMIF POD for 6" wafers. SMIF (Standard Mechanical Interface) is a wafer carrier used in semiconductor wafer fabrication and cleanroom environments. ... The bottom surface of the pod is the opening door, and when a SMIF pod is placed on a load port, the bottom door and cassette are lowered into the tool so that the wafers can be removed. ...
SMIF (Standard Mechanical Interface)是一种标准机械接口、一种模块化设计、由一系列标准化的模块组成，使用SMIF可以大大减少工艺设备的边角、从而提高生产效率。. 而可支持12寸的具有同样功能的设备叫 LPM （Load Port Module）。. 另外支持 E84协议 ，可对应AGV和 OHT ；含 RFID 功能及Smart Tag。
Secure FOUP handover with automated identification The RFID-based Smart Load Port (SLP) is a station for the manual input and output of 300mm FOUPs or 200mm SMIF pods into or out of an automatic overhead transport system in a semiconductor fab. The integrated RFID technology ensures automatic lot identification for during loading and unloading process. […]
FORTREND specializes in semiconductor transfer and handling solutions, including SMIF, Stocker, and Load Port, ensuring precision and efficiency in wafer processing. PRODUCTS. SMIF ARMS. WAFER SMIF. 150MM SMIF (STANDARD) 150MM SMIF (ROTATE) 200MM SMIF (STANDARD) 200MM SMIF (ROTATE) RETICLE SMIF.
SMIF LOAD PORT LP200-SMIF R. Operating voltage: 24 V DC Communication: Telnet (over TC Port 22) GUI (over TCP Port 9090) Connections: RJ45 (Ethernet) 5-pole electrical connector 7/8" ... Load Unload Reserved Alarm. Title: werner-lieb-technisches-datenblatt-LP200-SMIF-R-aktualisiert.indd
在SMIF的基础上，LPM（Load Port Module，上料模块）应运而生，专为支持12寸晶圆设计，旨在满足更大规模生产的需求。LPM不仅继承了SMIF的标准化特性，还引入了E84协议，使得AGV（自动导引车）和OHT（在线检测设备）之间的通信更为顺畅，同时集成RFID功能和Smart Tag ...
200mm SMIF Load Port; Clean Transport Systems. 200mm SMIF Load Port. 200mm. Fully Compatible with 300mm BOLTS-M Installation. SELOP-08 Series. Contribute to high throughput at 200mm process line by automation. OHT Transfer Applicable Secure SEMI E15 C2 distance; E63 BOLTS-M Installation
LPT 2200 SMIF Load Port Transfer from Asyst Technologies | Buy Today from Artisan. 30-Day Return Guarantee. 1-Year Warranty. Fast Shipping. Downloadable Technical Manuals and Datasheets. Trusted Supplier for Industrial & Military. View It Live with InstraView.
Our advanced SMIF load port solutions optimize wafer transfer, ensuring efficiency and precision in semiconductor equipment for streamlined production and cleanroom environments. PRODUCTS. SMIF ARMS. WAFER SMIF. 150MM SMIF (STANDARD) 150MM SMIF (ROTATE) 200MM SMIF (STANDARD) 200MM SMIF (ROTATE)